Purification workshop specifications

Of the purification workshop are generally applicable to the United States federal specification No. 209B. This specification has specified for the purification of the environmental elements, like the air cleanliness, temperature and humidity, indoor pressure, etc. However, with the continuous improvement of the degree of cleanliness, the US Federal specification has been revised, and its contents are mainly classified by cleanliness. The latest version has become No209E and the name has been changed. The No.209E level means that more than 0.5um particles for the 10x / m3, the X expressed as a level, while the meaning of the metric M, expressed as M3.5 and so on. In table 7, shows the United States Federal specification No. 209B. In Table 8, shows the United States Federal specification No. 209E. In Japan, the corresponding specification is JIS B9920. The level of JIS9920 indicates that the number of particles above 0.1um is specified as 10X, use Y to indicate the level. The table 9 shows the main content of JIS B 9920.

  

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Table 7, U.S. Federal specifications No. 209B

 

Purification level

Particle

Indoor pressurePa
mmH2O

Temperature

Humidity

Airflow 
Number of ventilation

Illumination

Particle size  
um

Cumulative number of particles

range(℃)

Recommended value(℃)

Difference 
(℃)

High(%)

lowest 
%

Error 
%

100 
  
1000 
  
10000 
  
100000

≧0.5 
  
≧0.5 
≧5 
≧0.5 
≧5 
≧0.5 
≧5

100 
  
1000 
10 
10000 
65 
100000 
700

+13 
(+1.3) 
above

19.4— 
25

22.2

  
  
±2.8 
Especially for±1.4

45

30

  
  
±10 
Especially for 
±5

  
Laminar flow0.45m/s
±0.1m/s 
Non-laminar flow
≧20 time/h

  
1080--1620

 

Table 8. Classification of cleanliness levels of U.S. federal specifications No. 209E

 

The level limit is the alias for all levels. The upper limit is indicated by the concentration of the specified particle size (the number of particles per unit). *

 

Level names**

Upper limit value

particle size0.1um

particle size0.2um

particle size0.3um

particle size 
 0.5um

particle size 
5um

SI***

English 
Unit

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

MI 
M1.5    
M2 
M2.5 
M3 
M3.5 
M4 
M4.5 
M5 
M5.5 
M6 
M6.5 
M7

  

  
10 
  
100 
  
1000 
  
10000 
  
100000

350 
1240 
3500 
12000 
35000 
-- 
-- 
-- 
-- 
-- 
-- 
-- 
--

9.91 
35.0 
99.1 
350 
991 
-- 
-- 
-- 
-- 
-- 
-- 
-- 
--

75.7 
265 
757 
2650 
7570 
26500 
75700 
-- 
-- 
-- 
-- 
-- 
--

2.14 
7.50 
21.4 
75.0 
214 
750 
2140 
-- 
-- 
-- 
-- 
-- 
--

30.9 
106 
309 
1060 
3090 
10600 
30900 
-- 
-- 
-- 
-- 
-- 
--

0.875 
3.00 
8.75 
30.0 
87.5 
300 
875 
-- 
-- 
-- 
-- 
-- 
--

10.0 
35.3 
100 
353 
1000 
3530 
10000   35300 
100000 
353000 
1000000 
3530000 
10000000

0.283 
1.00 
2.83 
10.0 
28.3 
100 
283 
1000 
2380 
10000 
28300 
100000 
283000

-- 
-- 
-- 
-- 
-- 
-- 
-- 
247 
618 
2470 
6180 
24700 
61800

-- 
-- 
-- 
-- 
-- 
-- 
-- 
7.00 
17.5 
70.0 
175 
700 
1750

 

*The level limit value expressed in the above table is defined only for the level classification, and doesn’t represent the actual particle size distribution.

**For the concentration of intermediate level, the formula is calculated using the following formula.

Particle diameter/m3 = 10M (0.5 / d) 2.2, in which M: level name in SI unit, d: particle size (um)

* * * international unit (short for systeme international d 'unites)

  

 

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Table 9. JIS B 9920 main content

 

Interpurification level

 standard sedimentation diameter
(um)

Cumulative number of particles(pc/m3)








8

0.1 
0.1 
0.1 
0.1 
0.1 
0.1 
0.1 
0.1

101 
102 
103 
104 
105 
106 
107 
108

 

Table 10. Main contents of NASA's specifications

 

Level of biological purification

particle

Biological particles

Indoor pressure 
Pa 
mmH2O 
  

Temperature 

Humidity
%

Air ventilation frequency 

Illuminance
Lx

Particles size 
um

Cumulative number of particles pc/ft 
(pc/l)

Floating volume 
pc/ft 
(pc/l)

Settlement

  
100 
  
10000 
  
  
  
100000

≧0.5 
  
  
≧0.5 
  
≧5 
  
≧0.5 
  
≧5

100 
(3.5) 
  
10000 
(350) 
65(2.3) 
  
100000 
(3500) 
700(25)

0.1 
(0.0035) 
  
0.5 
(0.0176) 
  
  
2.5 
(0.0884)

1200 
(12900) 
  
6000 
(64000) 
  
  
30000 
(323000)

  
  
+13 
(+1.3) 
above

  
  
Recommended value

  
  
40— 
50

  
  
Laminar flow 
0.45m/s 
±0.1m/s 
Non-laminar flow 
≧20 time/h

1080— 
162