The electronic chip clean room is a special industrial building designed to effectively control key parameters such as air particle concentration, microbial count, temperature and humidity, air flow speed and air pressure in the workshop. The precise control of these conditions ensures the smooth progress of the production process and the high standard of product quality to meet the strict requirements of electronic chip manufacturing.
1. Equipment selection
1. Air treatment equipment
Air treatment equipment is one of the key factors in maintaining the cleanliness of the workshop. Its main function is to filter and purify pollutants in the workshop, and at the same time adjust parameters such as temperature, humidity and air pressure in the workshop to meet the requirements of production process and product quality.
2. Air shower room
The air shower room is an important equipment in the clean workshop, which is mainly used to remove dust, sterilize and purify personnel, materials and equipment entering the workshop. The electronic chip clean workshop should be equipped with an air shower room to reduce the entry of external dust, microorganisms and other pollutants into the workshop. The size and number of air shower rooms should be designed according to the actual situation of the workshop to ensure that it can meet the cleanliness requirements of the workshop.
3. Clean room dressing room
The clean room dressing room is an isolation area inside and outside the clean room. The staff needs to wear clean clothes, gloves, shoe covers and other protective equipment in this area to ensure that the personnel entering the clean room will not bring in external pollutants.
4. Air shower
The air shower is used to perform air showers on personnel entering the clean room to remove particles and bacteria that may be carried by the personnel and ensure the cleanliness of the workshop.
5. Air purifier
The air purifier can purify pollutants such as dust, bacteria, viruses, etc. in the workshop air to ensure the cleanliness of the workshop.
6. Temperature and humidity control system
The temperature and humidity control system can control parameters such as temperature, humidity and air pressure in the workshop to ensure that the workshop environment meets the requirements of production process and product quality.
2. HVAC system
1. Air conditioning system
The air conditioning system is the main HVAC equipment in the electronic chip clean workshop. Its function is to adjust parameters such as workshop temperature, humidity and air flow speed to maintain the cleanliness and comfort of the workshop.
2. Air supply system
The air supply system sends clean air from the air conditioning equipment into the workshop to form a relatively static air flow layer to maintain the cleanliness of the workshop.
3. Exhaust system
The exhaust system of the electronic chip clean workshop is one of the key equipment of the entire workshop. Its function is to exhaust pollutants in the workshop and maintain the cleanliness of the workshop.
At present, there are two main types of exhaust systems in the electronic chip clean workshop, namely local exhaust systems and global exhaust systems. The local exhaust system uses a single device to exhaust local process equipment, which can achieve higher air volume and static pressure, and is suitable for workshops with higher requirements for air cleanliness. The global exhaust system includes the entire workshop in the exhaust range, which is mainly used in occasions where the requirements for workshop temperature, humidity and cleanliness are not very high.
3. Decoration materials
When choosing decoration materials for electronic chip clean workshops, it is necessary to consider their impact on the clean environment, and also ensure that they have anti-static capabilities. It is recommended to choose anti-static floors, walls, ceilings and other materials.
For the corners of walls and floors, arc designs should be used to reduce dust accumulation.
1. Lighting design
In the lighting design of electronic chip clean workshops, lighting equipment with anti-static functions should be selected. It is recommended to use cold light sources or LED lamps to reduce heat radiation and heat dissipation. At the same time, it is also necessary to consider the uniformity and brightness of lighting to meet work needs.
2. Waste gas and wastewater treatment system
During the production process of the electronic chip clean workshop, a large amount of waste gas and wastewater will be generated. In order to ensure the cleanliness of the environment and ecological protection, a corresponding waste gas and wastewater treatment system must be configured. The waste gas treatment system mainly includes the exhaust system and the tail gas treatment system, and the wastewater treatment system mainly includes the sewage collection, pretreatment and treatment system.
3. Pure water system
A large amount of pure water is required in the production process of the electronic chip clean workshop, so a pure water system needs to be configured. The pure water system should include a pre-treatment system and a purification system to ensure that the supplied pure water can meet the production requirements of the workshop.
4. Gas supply system
A large amount of nitrogen, hydrogen and other gases are required in the production process of the electronic chip clean workshop, so a corresponding gas supply system needs to be configured. The gas supply system should include gas storage tanks, gas filtration, gas drying and other equipment to ensure the quality and stability of the supplied gas.
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