With the rapid development of the electronics industry, the electronics industry has increasingly stringent requirements for the environment and its supporting projects. As an important part of the electronics factory, the air-conditioning system not only needs to stably control the indoor temperature, humidity, and cleanliness, but also needs to consider the energy consumption of the purification air conditioner. Therefore, large-scale clean factories usually adopt a more energy-saving MAU+DC+FFU system solution.
1. Introduction to MAU+FFU+DCC system
MAU: Make-up Air Unit fresh air air conditioning box
Mainly responsible for humidity control
FFU: Fan Filter Unit Fan Filter Unit
Mainly responsible for cleanliness control
DCC: Dry Cooling Coil dry coil
Mainly responsible for temperature control
The MAU+FFU+DCC air conditioning system is mainly used in electronic clean workshops with high cleanliness requirements (thousand-level or above). In China's microelectronics (integrated circuit) industry, optoelectronics (TFT-LCD, LCD, LED, etc.) industry and other large It is widely used in clean workshops with large area and high cleanliness level. It has the advantages of easy adjustment, significant energy saving, adaptability to technological upgrading, and greatly saving non-production area and non-production space.
The schematic diagram of the MAU+FFU+DCC system is as follows:
The fresh air conditioning box processes the fresh air to below the intersection of the heat and humidity ratio line and the relative humidity 95% line of the clean room. The fresh air unit not only needs to remove its own wet load, but also needs to bear the wet load generated in the clean room to ensure that the relative humidity of the clean room meets the requirements. The dry cooling load that is insufficiently treated by the fresh air unit can be supplemented by the dry coil located in the lower mezzanine or ceiling of the clean room. Since the dry coil is located in the ceiling or aisle through which the FFU circulating air passes, the dry cooling load provided by the dry coil will be brought into the clean room by the circulating air.
Advantages of MAU+FFU+DCC clean air conditioning system
（1）High flexibility and high coverage rate. The flexibility of clean air conditioning system is very important for electronic factories. If the cleanliness of the workshop needs to be adjusted regionally due to process changes, the cleanliness of the local area can be changed by changing the FFU air volume or replacing the blind plate. When densely arranged, the coverage rate can reach 85.5%.
（2）The upper ceiling of the FFU is negative pressure, which can play a sealing role. The ceiling is negative pressure, and the air pressure in the clean room is greater than the space in the ceiling. If there is a gap between the FFU and the bracket, the negative pressure in the ceiling prevents the air that has not been efficiently filtered from entering the room, which is beneficial to ensuring the cleanliness of the clean room.
（3） The resistance of the air flow system is small, and the wind speed at the air outlet is low.
（4）The equipment has low energy consumption. After adopting FFU, there is no need to add a booster fan. The fan is broken down into parts, and there is no need for a dedicated machine room. At the same time, the resistance of the air supply pipeline is eliminated.
Semiconductor clean workshop application: For example, the building area is about 6800㎡, of which the Class 100 and Class 1000 clean areas are about 3000㎡. The clean production area adopts the air conditioning form of MAU (fresh air handling unit) + FFU (fan filter unit) + DCC (dry cooling coil). The circulating air in the production area passes through the elevated floor from the lower technical mezzanine to the upper technical mezzanine through the return air channel and the dry coil, and then is sent to the clean production area through the fan filter unit. The treated circulating air must ensure that the clean room in the corresponding area maintains the required uniform cleanliness level and temperature.
The fresh air (MAU) system uses water washing, cooling and dehumidification, filtration or heating, humidification and filtration to supplement the process exhaust in the clean room with clean fresh air and maintain positive pressure. The fresh air air conditioning unit with fixed temperature and humidity parameters consists of an air intake section, a G4 plate-type primary filter section, and an F9 bag-type medium-efficiency filter section.
For FFU, the number of FFUs required for each area is calculated according to the cleanliness requirements and the selected FFU specifications for layout. As the main purification equipment in the clean room, it can effectively filter particles and impurities in the air to ensure that the air quality in the clean room meets production requirements. Its efficient air shower function can quickly purify the air and reduce the impact of dust, bacteria, etc. on product quality.
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